Products & Services
Master Photomasks
You’re the master
Reduction Reticles
Scale-up, step & repeat
Copy Masks
Economical copies
Other Services
View our other services
Master (1X) Photomasks
Master Photomasks typically contain the full image intended for the final wafer. Microtronics offers a full range of master photomasks in various sizes and materials, with specifications that can be fully customized to meet your specific requirements.
Some of our most common sizes are listed below.
Product | Plate Dimensions | Substrate Material1 |
---|---|---|
Master (1X) | 4″ X 4″ X 0.060″ or 0.090″ | Soda Lime and Quartz |
5″ X 5″ X 0.090″ | Soda Lime and Quartz | |
6″ X 6″ X 0.090″ or 0.120″ | Soda Lime and Quartz | |
7″ X 7″ X 0.120″ | Soda Lime and Quartz | |
Critical Dimension | CD Tolerance |
---|---|
≤ 2.0 μm2 | |
≥ 2.0 μm | ± 0.5 μm |
≥ 3.0 μm | ± 0.5 μm |
≥ 5.0 μm | ± 0.5 μm |
≥ 10.0 μm | ± 1.0 μm |
Reduction Reticles
A reticle is a type of photomask where the original design is scaled up, typically by a factor of 1 to 10X. The reticle image is then transferred to the wafer using a ‘step and repeat’ system. The image on the reticle is reduced through the system’s optics and exposed onto the wafer substrate multiple times to build up the full array of images covering the target wafer or glass plate.
Specifications can be fully customized to meet your specific needs.
Product | Plate Dimensions | Substrate Material |
---|---|---|
2X 2.5X 4X |
6″ X 6″ X 0.250″ | Quartz |
5X | 5″ X 5″ X 0.090″ | Quartz |
6″ X 6″ X 0.250″ | Quartz |
Copy Masks
Copy masks are intended for use in high-volume or destructive use applications. These are typically produced using a contact printing process to create replicate copies of the master photomask design. Generally, more economical than a Master Photomask, these copies can be replaced when they become damaged.
We retain the original print master securely within our facility.
Product | Plate Dimensions | Substrate Material |
---|---|---|
Copy Mask | 4″ X 4″ X 0.060″ or 0.090″ | Soda Lime and Quartz |
5″ X 5″ X 0.090″ | Soda Lime and Quartz | |
6″ X 6″ X 0.090″ or 0.120″ | Soda Lime and Quartz | |
7″ X 7″ X 0.120″ | Soda Lime and Quartz |
Other Services
Data Conversion
DXF, DWG, GDSII formats
Measurement and Calibration Services
We can provide NIST traceable measurements in our ISO 17025:2017 accredited laboratory.
Dicing
Our dicing service is the most accurate method for cutting components imaged on a glass plate and is ideal for large quantities of smaller components. The component is arrayed on a larger master plate. Then a dicing blade or laser is aligned to special fiducial marks added to the plate pattern. Unless specified, standard tolerances are: +/- 0.004” / (0.102mm).
Edge Grinding – Rounds
For round components, we have an “edging” service. This is suitable for smaller quantities and diameters between 10mm and 60mm. Unless specified, standard tolerances for round centering / TIR: 0.005” max / (0.127mm) Further processing options, such as core drilling or other machining techniques can be achieved with a CNC to create more intricate components.