Products & Services

Master (1X) Photomasks

Master Photomasks typically contain the full image intended for the final wafer. Microtronics offers a full range of master photomasks in various sizes and materials, with specifications that can be fully customized to meet your specific requirements.

Some of our most common sizes are listed below.

**Master (1X) Photomasks Plate Dimensions and Substrate Materials**
Product	Plate Dimensions	Substrate Material¹
Master (1X)	4″ X 4″ X 0.060″ or 0.090″	Soda Lime and Quartz
	5″ X 5″ X 0.090″	Soda Lime and Quartz
	6″ X 6″ X 0.090″ or 0.120″	Soda Lime and Quartz
	7″ X 7″ X 0.120″	Soda Lime and Quartz

**Common Specifications**
Critical Dimension	CD Tolerance
≤ 2.0 μm²
≥ 2.0 μm	± 0.5 μm
≥ 3.0 μm	± 0.5 μm
≥ 5.0 μm	± 0.5 μm
≥ 10.0 μm	± 1.0 μm

Reduction Reticles

A reticle is a type of photomask where the original design is scaled up, typically by a factor of 1 to 10X. The reticle image is then transferred to the wafer using a ‘step and repeat’ system. The image on the reticle is reduced through the system’s optics and exposed onto the wafer substrate multiple times to build up the full array of images covering the target wafer or glass plate.

Specifications can be fully customized to meet your specific needs.

**Reticle Photomasks Plate Dimensions and Substrate Materials**
Product	Plate Dimensions	Substrate Material
2X 2.5X 4X	6″ X 6″ X 0.250″	Quartz
5X	5″ X 5″ X 0.090″	Quartz
5X	6″ X 6″ X 0.250″	Quartz

Copy Masks

Copy masks are intended for use in high-volume or destructive use applications. These are typically produced using a contact printing process to create replicate copies of the master photomask design. Generally, more economical than a Master Photomask, these copies can be replaced when they become damaged.

We retain the original print master securely within our facility.

**Copy Photomasks Plate Dimensions and Substrate Materials**
Product	Plate Dimensions	Substrate Material
Copy Mask	4″ X 4″ X 0.060″ or 0.090″	Soda Lime and Quartz
	5″ X 5″ X 0.090″	Soda Lime and Quartz
	6″ X 6″ X 0.090″ or 0.120″	Soda Lime and Quartz
	7″ X 7″ X 0.120″	Soda Lime and Quartz

Other Services

Data Conversion

DXF, DWG, GDSII formats

Measurement and Calibration Services

We can provide NIST traceable measurements in our ISO 17025:2017 accredited laboratory.

Dicing

Our dicing service is the most accurate method for cutting components imaged on a glass plate and is ideal for large quantities of smaller components. The component is arrayed on a larger master plate. Then a dicing blade or laser is aligned to special fiducial marks added to the plate pattern. Unless specified, standard tolerances are: +/- 0.004” / (0.102mm).

Edge Grinding – Rounds

For round components, we have an “edging” service. This is suitable for smaller quantities and diameters between 10mm and 60mm. Unless specified, standard tolerances for round centering / TIR: 0.005” max / (0.127mm) Further processing options, such as core drilling or other machining techniques can be achieved with a CNC to create more intricate components.