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Master (1X) Photomasks

Master Photomasks typically contain the full image intended for the final wafer.  Microtronics offers a full range of master photomasks in various sizes and materials, with specifications that can be fully customized to meet your specific requirements.

Some of our most common sizes are listed below:

Master (1X) Photomasks Plate Dimensions and Substrate Materials
Product Plate Dimensions Substrate Material1
Master (1X) 4″ X 4″ X 0.060″ or 0.090″ Soda Lime and Quartz
5″ X 5″ X 0.090″ Soda Lime and Quartz
6″ X 6″ X 0.090″ or 0.120″ Soda Lime and Quartz
7″ X 7″ X 0.120″ Soda Lime and Quartz


1Low reflective chrome unless otherwise specified
Options (lead times may vary for non-standard material selections):

  • Iron Oxide
  • Substrate Material: Borofloat, B270
  • Other Plate Dimensions/Thickness
Common Specifications
Critical Dimension CD Tolerance
≤ 2.0 μm2
≥ 2.0 μm ± 0.5 μm
≥ 3.0 μm ± 0.5 μm
≥ 5.0 μm ± 0.5 μm
≥ 10.0 μm ± 1.0 μm

2Contact us for design review
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